| Sensor Type | Cold Cathode/MicroPirani™ (MEMS Thermal Conductivity)/Piezo Differential (MEMS Diaphragm) |
| Measuring Range Absolute | 1 x 10-8 Torr to 1500 Torr |
| Measuring Range Differential | -760 to +760 Torr |
| Set Point Range Absolute | 1 x 10-8 Torr to 1000 Torr |
| Set Point Range Differential | -760 to +100 Torr |
| Calibration Gas | Nitrogen |
| Operating Temperature Range | 0° to 40°C (32° to 104°F) |
| Maximum Bakeout Temperature | 85°C (185°F), non-operating |
| Digital Communications | RS485 or RS232 |
| Controls | Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; setpoint functions: value, hysteresis, direction, HV enable, protect, control setpoint, gas type |
| Status | Pressure reading and units, setpoint, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions |
| Analog Output (Absolute Pressure) | 0.5 VDC/decade |
| Relays | 3 relays, SPST |
| Relay Contact Rating | 1 A @ 30VAC/DC, resistive |
| Power Requirements | 9-30 VDC, 2 W |
| Accuracy (Typical) Combined Absolute | 5 x 10-8 Torr to 10-3 ± 30% of reading 10-3 to 50 Torr ±5% of reading 50 to 1000 Torr ± 1% of reading |
| Repeatability (Typical) Combined Absolute | 5 x 10-8 Torr to 10-3 ± 30% of reading 10-3 to 50 ±2% of reading 50 to 1000 Torr ± 1% of reading |
| Accuracy (Typical) 1 Differential | -10 to +10 Torr ±10% of reading -100 to -10 Torr ±8% of reading -760 to -100 Torr ±1% of reading +10 to 100 Torr ±5% of reading |
| Repeatability (Typical) 1 Differential | -760 to +10 Torr ±1% of reading |
| Zero Stability (Typical) 1 Differential | ±0.1% of Full Scale (F.S. = 760 Torr) |
| Overpressure Limit | 1500 Torr |
| Installation Orientation | Any |
| Internal Volume | 21 cm3 |
| Materials Exposed to Vacuum | 304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic |
| Electronic Casing | 304 stainless steel |
| Weight (with NW25 KF Flange) | 12.7 oz (360 g) |
| CE Certification | EMC Directive 89/336/EEC, EN-61326-1 Low Voltage Directive 73/23/EEC, EN-61010-1 |