Sensor | Type 1: MicroPirani (MEMS Thermal Conductivity) Type 2: Piezo Absolute (MEMS Diaphragm) |
Measuring Range | 1.0 X 10-5 to 1,500 Torr (absolute) |
Set Point Range | 5.0 X 10-4 to 1,500 Torr (absolute) |
Calibration Gas | Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon Gas independent above 11 Torr |
Operating Temperature | 0° to 40°C (32° to 104°F) |
Maximum Bakeout Temperature | 85°C (185°F), non-operating |
Digital Communication | RS485/RS232 (4800 to 230400 Baud) |
Controls | Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test |
Status | Pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer |
Analog Output | 1 to 9.2 VDC, 1 VDC/decade, 100Ω maximum output impedance (absolute pressure) |
Analog Output Resolution | 16 bit |
Relays (optional) | 910 - 3 relays SPDT |
Contact Rating | 1 A @ 30VAC/DC, resistive |
Response | 100 msec maximum |
Power Requirements | 9 to 30 VDC, 150 ma, < 1.2 watts maximum |
Accuracy1 | 5 x 10-4 to 1 x 10-3 Torr ±10% of reading 1 x 10-3 to 11 Torr ±5% of reading 11 to 1000 Torr ±0.75% of reading (typical values measured with Nitrogen gas at ambient temperature after zero adjustment) |
Repeatability | 5 x 10-4 to 10-3 Torr ±8% of reading 10-3 Torr to 11 Torr ±2% of reading 11 to 1000 Torr ±0.2% of reading (typical values measured with Nitrogen gas at ambient temperature after zero adjustment) |
Overpressure Limit | 2250 Torr (absolute) |
Installation Orientation | Any |
Internal Volume | 2.8 cm3 (KF16) |
Materials Exposed to Vacuum | Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton® |
Electronic Casing & Flange | 304 stainless steel |
Weight | 170 g (with KF 16 Flange) |
Compliance | EMC Directive 2004/108/EC |