Vakuová měrka 901P

Popis a vlastnosti vakuové měrky 901P

Vakuová měrka 901P používá pro měření senzory - MicroPirani™ (MEMS Thermal Conductivity) a Piezo differential (MEMS diaphragm).

Technická specifikace

01P
Sensor	MicroPirani™ (MEMS Thermal Conductivity) Piezo differential (MEMS diaphragm)
Measuring Range
Absolute	1.0 X 10-5 Torr to 1500 Torr
Differential	-760 to +760 Torr
Set Point Range
Absolute	5.0 X 10-4 Torr to 1000 Torr
Differential	-760 to +100 Torr
Calibration Gas	Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon
Operating Temperature Range	0° to 40°C (32° to 104°F)
Maximum Bakeout Temperature	85°C (185°F), non-operating
Digital Communication	RS485/RS232 (4800 to 230400 Baud)
Controls	Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
Status	Absolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
Analog Output
Absolute Pressure	1 to 9 VDC, 1 VDC/decade, 100Ω maximum output impedance
Resolution	16 bit
Analog Output 2 (optional)
Piezo Differential	5 VDC = 0 Torr, 1 VDC/decade
Resolution	12 bit
Relays	901P - 3 relays SPDT (optional)
Contact Rating	1 A @ 30VAC/DC, resistive
Response	100 msec maximum
Power Requirements	9 to 30 VDC, < 1.2 watts max
Accuracy/Repeatability
MicroPirani™
Accuracy	5 X 10-4 to 1 X 10-3 Torr ±10% of reading 1 X 10-3 to 100 Torr ±5% of reading 100 Torr to Atm ±25% of reading
Repeatability	1 X 10-3 to 100 Torr ±2% of reading
Piezo Differential
Accuracy	-10 to +10 Torr ±10% of reading -100 to -10 Torr ±8% of reading -760 to -100 Torr ±1% of reading +10 to 100 Torr ±5% of reading
Repeatability	-760 to +10 Torr ±1% of reading
Zero Stability	±0.1% of Full Scale (Full Scale = 760 Torr)
Overpressure Limit	1500 Torr (Absolute)
Installation Orientation	Any
Internal Volume	(KF16) 2.8 cm3
Materials Exposed to Vacuum	Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton®
Electronic Casing and Flange	304 stainless steel
Weight	170 g (with KF 16 Flange)
Compliance	EMC Directive 2004/108/EC
Notes:	Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment.