| Total Pressure Measurement Range | 1e-10 to 1e-2 Torr |
| Accuracy Standard | 1e-8 to 1e-4 Torr ± 30% (typical) |
| Accuracy Calibrated Gauge | 1e-8 to 1e-4 Torr ± 10% |
| Repeatability | 1e-8 to 1e-4 Torr ± 5% (typical) |
| Electronics Storage Temperature | -40°C to 70°C |
| Electronics Operating Temperature | 0 50°C |
| Bake-Out Temperature | 250°C (magnets removed) |
| Mounting Orientation | Any |
| Analog Output Signal | |
| Output voltage (log) | 0 11 VDC |
| Minimum Output Impedance | 200 Ohm |
| Minimum Load Impedance | 10k Ohm |
| Minimum Update Rate | 40 Hz |
| Analog Input Signal | Input voltage 0 - 11 VDC |
| Power Required | 13.5 - 36 VDC, <2 Watts |
| RS-485 Baud Rate | 1200-115,200 Baud |
| USB Interface | Micro-AB |
| Overpressure Protection | Controlled by an external gauge and/or measured pressure |
| Materials Exposed to Vacuum | 304 Stainless Steel, 17-7 stainless steel, ceramic, Cu brazing material, alumina, and molybdenum |
| Set Point Relays | Max 1A@30 VDC; Min 5ma at 5 VDC, maximum ripple 1Vpp |
| Weight | 652 grams |
| Compliance | RoHS and REACH EMC Directive: 2004/108/EC; EN61326-1 Low Voltage Directive: 2006/95/EC; EN61010-1 |