| Total Pressure Measurement Range | 1e-10 to 1e-2 Torr | 
| Accuracy Standard | 1e-8 to 1e-4 Torr ± 30% (typical) | 
| Accuracy Calibrated Gauge | 1e-8 to 1e-4 Torr ± 10% | 
| Repeatability | 1e-8 to 1e-4 Torr ± 5% (typical) | 
| Electronics Storage Temperature | -40°C to 70°C | 
| Electronics Operating Temperature | 0 50°C | 
| Bake-Out Temperature | 250°C (magnets removed) | 
| Mounting Orientation | Any | 
| Analog Output Signal | |
| Output voltage (log) | 0 11 VDC | 
| Minimum Output Impedance | 200 Ohm | 
| Minimum Load Impedance | 10k Ohm | 
| Minimum Update Rate | 40 Hz | 
| Analog Input Signal | Input voltage 0 - 11 VDC | 
| Power Required | 13.5 - 36 VDC, <2 Watts | 
| RS-485 Baud Rate | 1200-115,200 Baud | 
| USB Interface | Micro-AB | 
| Overpressure Protection | Controlled by an external gauge and/or measured pressure | 
| Materials Exposed to Vacuum | 304 Stainless Steel, 17-7 stainless steel, ceramic, Cu brazing material, alumina, and molybdenum | 
| Set Point Relays | Max 1A@30 VDC; Min 5ma at 5 VDC, maximum ripple 1Vpp | 
| Weight | 652 grams | 
| Compliance | RoHS and REACH EMC Directive: 2004/108/EC; EN61326-1 Low Voltage Directive: 2006/95/EC; EN61010-1  |