Display | 320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position. |
Compatible Sensors/Transducers | MKS Baratron® capacitance manometers providing 0 to 10 VDC output* MKS Pirani sensors MKS convection Pirani sensors MKS cold cathode ionization sensors - Series 423, 431 and 422 MKS hot cathode ionization sensors (nude & MIG types) *Limited to power requirements of ≤1 amp, cable connections and Full Scale ranges. |
Compatible Mass Flow Controllers | MKS Mass-Flo® MFCs MKS G, I, & P-Series MFCs MKS legacy MFCs Any MFC requiring ±15 VDC or +15 to +24 VDC, 0-5 VDC set point and standard 15 pin or 9 pin D-sub cable connection. |
Compatible Pressure Control Valves | MKS 248A, 148J, 154A (solenoid control valve) 153D and T3Bi (exhaust throttle valves) |
Pressure Measurement Range | 10,000 Torr to 10-11 Torr (Dependent upon sensor type) |
Measurement Range | 1.0 x 10-11 to 10,000 Torr 1.0 x 10-11 to 2.7 x 10+4 mbar 1.0 x 10-9 to 2.7 x 10+6 Pascal 1.0 x 10-8 to 2.0 x 10+7 microns |
Pressure Units | Torr, mbar, Pascal |
Flow Units | sccm and slm |
Operating Temperature | 5° to 40°C (41° to 104°F) |
Storage Temperature | 10° to 55°C (50° to 131°F) |
Relative Humidity | 80% max for temperatures less than 31°C, decreasing linearly to 50% maximum at 40°C |
Size | 1/2 rack, 2U High, 13 inches deep |
Power Requirement & Consumption | 150 watts maximum 100 - 240 VAC 50/60 Hz |
Set Point Relays | Twelve pressure dependent set points (4 per card slot) SPST relays, contact rating 2 amps @ 30 VAC |
Output | Buffered, log linear and linear output for each channel and log linear for combined channels |
Front Panel Controls | Power on-off switch, setup and operational commands can be accessed via the keypad |
Insulation Coordination | Over voltage Category II, Pollution Degree 2 |
Certification | 2004/108/EC EMC Directive 2006/95/EC Low Voltage Directive (with appropriate sensors) |
Dimensions | Half 19 inch Rack, 2U, 3.47 x 9.47 x 13.00 inches |
Weight | 8 lbs. (3.6 kg) |