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  • MFC a MFM - Hmotnostní průtokoměry pro měření a řízení průtoku
  • průtokoměry řady G
  • průtokoměry GM 50 A

průtokoměry GM 50 A

Pro více informací, prosím, kontaktujte prodejce:
  • Ing. Vojtěch Kroupa
  • +420 736 473 797
  • vojtech.kroupa@labtech.eu


Technická specifikace
Full Scale Flow Ranges5 - 50000 sccm (N2 equivalent)
(consult factory for available flow ranges)
Maximum Inlet Pressure150 psig
(can not exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential5 to 5000 sccm; 10 to 40 psid
10000 to 20000 sccm; 15 to 40 psid
30000 to 50000 sccm; 25 to 40 psid
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
Proof Pressure1000 psig
Burst Pressure1500 psig
Control Range2% to 100% of Full Scale (range on mech.)
Typical Accuracy±1% of setpoint for 20 to 100% Full Scale
± 0.2% of Full Scale for 2 to 20% Full Scale
(with N2 calibration gas)
Repeatability± 0.3% of Reading
Resolution0.1% of Full Scale
Temperature Coefficients
Zero<0.05% of Full Scale/°C
Span<0.08% of Reading/°C
Inlet Pressure Coefficient<0.02% of Reading/psi
Typical Controller Settling Time<750 msec, typical above 5%
(per SEMI Guideline E-17-0600)
Warm-up Time<30 minutes
(to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range10°C to 50°C (Ambient)
Storage Humidity0 to 95% Relative Humidity, non-condensing
Storage Temperature-20° to 80°C (-4° to 149° F)
FittingsCompatible with Swagelok® 4 VCR® male, 1/4 inch Swagelok® compression seal, surface mount, Swagelok® 8 VCR® male, 1/8 inch Swagelok®, 1/2 inch Swagelok®, 6 mm Swagelok®, 8 mm Swagelok®
Leak Integrity
External<1 x 10-10 (scc/sec He)
Through closed valve<1.0% of Full Scale at 40 psig inlet to atmosphere
(To assure no flow-through, a separate positive shut-off valve is required.)
Wetted Materials
Standard316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, Nickel
Valve SeatTeflon® (MFC only)
Surface Finish
MFC10µ inch average Ra
MFM16µ inch average Ra
Weightless than 3 lbs (1.4kg)
ComplianceCompliant to EMC Directive 2004/108/EC
Electrical Analog I/O Input Power Required+15 to +24 VDC @ (<4 watts)
Electrical Analog I/O Flow Input/Output Signal
Voltage(0 to 5 VDC) 15 pin Type "D" male, 9 pin Type "D" male
Current(4 to 20 mA) 15 pin Type "D" male
Input Power Required
DeviceNet™+11 to +25 VDC per (<4 watts)
RS-485+15 to +24 VDC per (<4 watts)
Profibus®+15 to +24 VDC per (<4 watts)
EtherCAT®+24 VDC per (<5 watts)
Connector
DeviceNet™5 pin micro connnector (power and comm.)
RS-4859 pin Type D male (power and comm.)
Profibus®9 pin Type D male (power); 9 pin Type D female (comm.)
EtherCAT®2 x RJ-45 (comm.) male; M8 male, 5 pin (power)
Data Rate Switch/Selection
DeviceNet™4 positions: 125, 250, 500K (Default)programmable over network
RS-485No switch Set Data Rate via RS485
Profibus®Set Data Rate via Profibus
EtherCAT®No switch
Comm. Rate(s)
DeviceNet™125 Kbps, 250 Kbps, 500 Kbps
RS-4859.6 Kbps, 19.2 Kbps, 38.4 Kbps
Profibus®9.6 Kbps to 12 Mbps
EtherCAT®100 Mbps
MAC ID Switches/Addresses
DeviceNet™2 switches, 10 positions; 0,0 to 6,3 ; 1 to 254
RS-485Set address over RS485; Station Addresses 0,0 to 9,9
Profibus®2 switches, 10 positions
EtherCAT®3 switches, 16 positions
Network Size
DeviceNet™Up to 64 nodes
RS-485Up to 32 nodes
Profibus®Up to 99 nodes
EtherCAT®Up to 4095 nodes
Visual Communication Indicators
DeviceNet™LED network status (green/red)
LED module status (green/red)
RS-485LED Comm (yellow)
LED Error (red)
Profibus®LED Comm (green/red)
LED Error (green/red)
EtherCAT®LED Power (green)
LED Run (green)
LED Error (red)
LED /Comm (green)
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