MKS - Technology for Productivity
Labtech

  • Domů
  • O nás
  • Kontakty

  • Domů
  • MFC a MFM - Hmotnostní průtokoměry pro měření a řízení průtoku
  • průtokoměry typu P
  • průtokoměr P9B

průtokoměr P9B

Pro více informací, prosím, kontaktujte prodejce:
  • Ing. Vojtěch Kroupa
  • +420 736 473 797
  • vojtech.kroupa@labtech.eu


Technická specifikace
Full Scale Flow Ranges5 - 50000 sccm (N2 equivalent)
consult factory for available flow ranges
Maximum Inlet Pressure150 psig
(cannot exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential10 to 5000 sccm; 10 to 40 psid
10000 to 20000 sccm; 15 to 40 psid
30000 to 50000 sccm; 25 to 40 psid
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
Proof Pressure1000 psig
Burst Pressure1500 psig
Control Range2% to 100% of Full Scale (range on mech.)
Typical Accuracy± 1% of setpoint for 20 to 100% Full Scale
± 0.2% of Full Scale for 2 to 20% Full Scale
Repeatability± 0.3% of Reading
Resolution0.1% of Full Scale
Temperature Coefficients
Zero< 0.05% of Full Scale/°C
Span< 0.08% of Reading/°C
Inlet Pressure Coefficient< 0.02% of Reading/psi
Typical Controller Settling Time< 750 msec., typical above 5% Full Scale
(per SEMI Guideline E-17-0600)
Warm-up Time< 30 minutes (to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range10°C to 50°C (Ambient)
Storage Humidity0 to 95% Relative Humidity, non-condensing
Storage Temperature-20° to 80°C (-4° to 149° F)
Pressure Display0 to 100 psia
Pressure Readout Unitspsia, kPA
Pressure Accuracy1% Full Scale
Pressure Resolution0.1 psia
Temperature Display0 to 100°C
Temperature Readout Units°C
Temperature Accuracy± 2°C
Temperature Resolution0.1°C
Attitude Insensitivity0.25% of Full Scale for indicated zero, span and actual span
Pressure Transient±5% of setpoint from 20 to 100% of Full Scale when subject to a 2 psi inlet pressure transient
(Inlet/Outlet Pressure Sensitivity)
FittingsCompatible with Swagelok® 4 VCR®, 11/8 inch surface mount (C-seal, W-seal), 11/2 inch W-seal
Display4 digits for value
4 characters for unit
Leak Integrity
External< 1 x 10-10 (scc/sec He)
Through closed valve< 1.0% of Full Scale at 25 psig inlet to atmosphere (range on mech.)
To assure no flow-through, a separate positive shut-off valve is required.
Wetted Materials
Standard316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45
Valve SeatPTFE (Teflon)
Surface Finish10µ inch average Ra
Weightless than 3 pounds (1.4kg)
ComplianceCE Compliant to EMC Directive 2004/108/EC
Input Power Required
DeviceNet™+11 to +25 VDC per DeviceNet specification (@ <3.5 watts)
RS-485+15 to +24 VDC @ 350mA max
Connector
DeviceNet™5 pin microconnnector (DeviceNet)
RS-4859 pin Type D male
Data Rate Switch
DeviceNet™4 positions: 125, 250, 500K (Default), PGM (programmable over the network)
RS-4853 positions: 9.6, 19.2, 38.4K (Default)
Data Rate/Network Length
DeviceNet™Data Rate (User Selectable)
125 Kbps, 500 meters (1,640 feet)
250 Kbps, 250 meters (820 feet)
500 Kbps, 100 meters (328 feet)
RS-485Data Rate (User Selectable)
9.6 Kbps, 1200 meters (4,000 feet)
19.2 Kbps, 1200 meters (4,000 feet)
38.4 Kbps, 1200 meters (4,000 feet)
MAC ID Switches
DeviceNet™2 switches, 10 positions
0,0 to 6,3 are hardware ID numbers
7,0 to 9,9 are software ID numbers
6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3
RS-4852 switches, 10 positions; 0,0 to 9,9.
Available MAC IDs are 3,2 to 9,9.
Network Size
DeviceNet™Up to 64 nodes
RS-485Up to 32 nodes
Network Topology
DeviceNet™Linear (trunkline/dropline) power and signal on same network cable
RS-485Master/slave
Visual Communication Indicators
DeviceNet™LED network status (green/red)
LED module status (green/red)
Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31))
RS-485LED network status (green/red)
LED module status (green/red)
Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31))
Máte dotaz?
Pole označená (*) musí být vyplněna
Email
Telefon
Váš Dotaz
Tučně označené položky je nutné vyplnit.

Naše nabídka
  • Baratron® - kapacitní manometry
  • MFC a MFM - Hmotnostní průtokoměry pro měření a řízení průtoku
    • průtokoměry MF1
    • průtokoměry řady G
    • průtokoměry typu I
    • průtokoměry typu P
  • HPS - vakuové měrky
  • Vakuové měrky a moduly - Granville Phillips
  • PLC - Programable Logic Controler

Vakuová měrka 902 B

Novinka, Vakuová měrka 902B
Více informací

Kontaktujte nás ještě dnesV případě, že jste na našich stránkách nenalezli odpověď na Vaše otázky, neváhejte nás kontaktovat.Kontaktujte nás

LABTECH s.r.o © 2011, Polní 23/340, CZ 639 00 Brno, Tel: +420 511 110 711, Fax: +420 543 210 115, info@labtech.eu
Webdesign : SHEAN