průtokoměr MF1
Pro více informací, prosím, kontaktujte prodejce:
- Ing. Martin Vondráček
- +420 778 759 907
- martin.vondracek@labtech.eu
Technická specifikace
| Full Scale Ranges | 10, 20, 50, 100, 200, 500, 1,000, 2,000, 5,000, 10,000, 20,000, 30,000, 50,000 sccm (N2 equivalent) |
| Maximum Inlet Pressure | 10 bar(g) (both MFC and MFM) |
| Normal Operating Pressure Differential | 10 to 5000 sccm: 0.7 to 2.7 bar (d) 10000 to 20000 sccm: 1.0 to 2.7 bar (d) (with atmospheric pressure at the MFC outlet) |
| Proof Pressure | 10 bar |
| Burst Pressure | 50 bar |
| Control Range | 2% to 100% of Full Scale |
| Measurement (Dynamic) Range | 1% to 100% of Full Scale |
| Typical Accuracy | ±(0.5% of reading +0.2% of Full Scale) (with N2 calibration gas) (including non-linearity, hysteresis and repeatability referenced to 1013 mbar and 0°C) |
| Repeatability | ±0.2% of Full Scale |
| Resolution | 0.1% of Full Scale |
| Temperature Coefficients | |
| Zero | <0.04% of Full Scale/°C |
| Span | <0.08% of Reading/°C |
| Pressure Coefficient | <0.02% of reading/psi |
| Controller Settling Time | <800 msec (350 msec on request) (per SEMI Guideline E17-91) |
| Warm-up Time | ~ 15 minutes |
| Normal Operating Temperature Range | 0°C to 40°C |
| Storage | |
| Humidity | 0 to 95% Relative Humidity, non-condensing |
| Temperature | -20° to 80°C |
| Fittings | 4 VCR® 1/4 inch Swagelok® 1/8 inch Swagelok® 4 VCO® 6 mm Swagelok® DN 16 KF MKS Surface Mount |
| Leak Integrity | |
| External | <1 x 10-9 mbar l/sec (He) (scc/sec He) |
| Through Closed Control Valve | <1 x 10-5 mbar l/sec (He) at 1.7 bar(g) inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is required) (MFC only) |
| Wetted Materials | |
| MFC, Standard | 1.4301 S.S. (V2A, ANSI 304), FKM, Nickel |
| MFC, Optional | NBR, FFKM (seals and valve seal) |
| Surface Finish | 6.3µ Rz |
| Weight | ~ 0.7 kg (1.6 lbs) |
| Input Voltage Required | ±15 VDC or +24 VDC (20.0 to 31.5 VDC) |
| Maximum Supply Current | 300mA @ +24VDC |
| Analog Set Point Command Signal | Configurable: Default: 0 to 5 VDC Zero: 0 to 2 VDC Full Scale: 5 to 10VDC (Analog interface versions only) |
| Analog Output Signal | Configurable: Default: 0 to 5 VDC Zero: 0 to 2 VDC Full Scale: 5 to 10VDC (Analog interface versions only) |
| Connectors | |
| Power | Standard Industrial Terminal, 3.81 mm pitch (Phoenix Contact MC-series, 3.81 mm pitch) |
| Setup | USB Setup Interface micro-B |
| Signal | Analog: 9-pin D-Sub pin Analog: 15-pin D-Sub pin Profibus-DPV0/DPV1: 9-pin D-Sub socket Modbus: 9-pin D-Sub socket EtherCAT, Profinet, Modbus TCP: 2x RJ45 USB Process Interface: B |
| Compliance | Fully CE Compliant to EMC Directive 2004/108/336/EC when used with an overall metal braided shielded cable properly grounded at both ends |
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