průtokoměr IM 50 a
Pro více informací, prosím, kontaktujte prodejce:
- Ing. Vojtěch Kroupa
- +420 736 473 797
- vojtech.kroupa@labtech.eu
Technická specifikace
| Full Scale Flow Ranges | 5 - 50000 sccm Full Scale (N2 equivalent) (consult factory for available flow ranges) |
| Maximum Inlet Pressure | 150 psig (cannot exceed pressure differential requirement across MFC) |
| Normal Operating Pressure Differential | 5 to 5000 sccm: 10 to 40 psid 10000 to 20000 sccm: 15 to 40 psid 30000 to 50000 sccm: 25 to 40 psid (N2 Full Scale) (with atmospheric pressure at the MFC outlet) |
| Proof Pressure | 1000 psig |
| Burst Pressure | 1500 psig |
| Control Range | 2% to 100% of Full Scale (range on mech.) |
| Typical Accuracy | ±1% of setpoint for 20 to 100% Full Scale ±0.2% of Full Scale for 2 to 20% Full Scale (with N2 calibration gas) |
| Repeatability | ±0.3% of Reading |
| Resolution | 0.1% of Full Scale |
| Temperature Coefficients | |
| Zero | <0.05% of Full Scale/°C |
| Span | <0.08% of Reading/°C |
| Inlet Pressure Coefficient | <0.02% of Reading/psi |
| Typical Controller Settling Time | <750 msec., typical above 5% Full Scale (per SEMI Guideline E-17-0600) |
| Warm-up Time | <30 min (to within 0.2% of Full Scale of steady state performance) |
| Operating Temperature Range | 10°C to 50°C (Ambient) |
| Storage Humidity | 0 to 95% Relative Humidity, non-condensing |
| Storage Temperature | -20° to 80°C (-4° to 149° F) |
| Fittings | Compatible with Swagelok® 4 VCR® or ¼ inch Swagelok® compression seal |
| Leak Integrity | |
| External | <1 x 10-10 (scc/sec He) |
| Through Closed Valve | <1.0% of Full Scale at 40 psig inlet to atmosphere (to assure no flow-through, a separate positive shut-off valve is required) |
| Wetted Materials | |
| Standard | 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality) 316 S.S., Elgiloy®, Nickel |
| Valve Seat | Teflon® (MFC only) |
| Surface Finish | MFC: 10µ inch average Ra (electropolished) MFM: 16µ inch average Ra |
| Analog I/O | |
| Input Power Required | +15 to +24 VDC @ (<4 watts) |
| Flow Input/Output Signal | 0 to 5 VDC |
| Connector | 15-pin Type "D" male, 9-pin Type "D" Male |
| Profibus® Digital I/O | |
| Input Power Required | +15 to +24 VDC (<4 watts) |
| Connector | 9 pin Type D male (power) and 9 pin Type D female (comm.) |
| Data Rate Switch/Selection | No switch Set Data Rate via Profibus® |
| Data Rate | Data Rate (User Selectable) 9.6 Kbps to 12 Mbps |
| MAC ID Switches/Addresses | Station Addresses 0,0 to 9,9 |
| Network Size | Up to 99 nodes |
| Network Topology | Master/slave |
| Weight | less than 3 lbs (1.4kg) |
| Enclosure Rating | IP66 |
| Compliance | RoHS Analog & Digital I/O CE Compliant to EMC Directive 2004/108/EC |
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