průtokoměr IM 250 A
Pro více informací, prosím, kontaktujte prodejce:
- Ing. Vojtěch Kroupa
- +420 736 473 797
- vojtech.kroupa@labtech.eu
Technická specifikace
| Full Scale Flow Ranges | 100 to 250 slm (N2 equivalent) |
| Maximum Inlet Pressure | 150 psig (cannot exceed pressure differential requirement across MFC) |
| Normal Operating Pressure Differential | 25 to 45 psid |
| Proof Pressure | 1000 psig |
| Burst Pressure | 1500 psig |
| Control Range | 2% to 100% of Full Scale (range on mech.) |
| Typical Accuracy | ±1% of setpoint for > 20 to 100% Full Scale ±0.2% of Full Scale for 2 to 20% Full Scale |
| Repeatability | ±0.3% of Reading |
| Resolution | 0.1% of Full Scale |
| Temperature Coefficients | |
| Zero | <0.05% of Full Scale/°C |
| Span | <0.08% of Reading/°C |
| Inlet Pressure Coefficient | <0.02% of Reading/psi |
| Typical Controller Settling Time | <3 sec typical above 10% Full Scale @ 50 psi (per SEMI Guideline E-17-0600) |
| Warm-up Time | <30 min (to within 0.2% of Full Scale of steady state performance) |
| Operating Temperature Range | 10°C to 50°C (Ambient) |
| Storage Humidity | 0 to 95% Relative Humidity, non-condensing |
| Storage Temperature | -20° to 80°C (-4° to 149° F) |
| Temperature Display | 0 to 85°C |
| Temperature Readout Units | °C |
| Temperature Accuracy | ±2°C |
| Temperature Resolution | 0.1°C |
| Fittings | Compatible with Swagelok® 8 VCR® |
| Leak Integrity | |
| External | <1 x 10-10 (scc/sec He) |
| Through Closed Valve | <1.0% of Full Scale at 40 psia to vac (<500 mTorr) (to assure no flow-through, a separate positive shut-off valve is required) |
| Wetted Materials | 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality) 316 S.S., Elgiloy, 430FR, Buna-N, nickel, polyimide (standard) |
| Surface Finish | 10µ inch average Ra |
| Analog I/O | |
| Input Power Required | +15 to +24 VDC @ (<4 watts) |
| Flow Input/Output Signal | Voltage (0 to 5 VDC) Current (4 to 20 mA) |
| Connector | 15-pin Type "D" male |
| Weight | less than 3 lbs (1.4kg) |
| Enclosure Rating | IP66 |
| Compliance | RoHS Analog & Digital I/O CE Compliant to EMC Directive 2004/108/EC |
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