průtokoměr IE 50A

Full Scale Flow Ranges (N2 equivalent) 5 - 50000 sccm (consult factory for available flow ranges)
Maximum Inlet Pressure 150 psig (cannot exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential (N2 F.S.) 10 to 5000 sccm; 10 to 40 psid (with atmospheric pressure at the MFC outlet) 10000 to 20000 sccm; 15 to 40 psid 30000 to 50000 sccm; 25 to 40 psid
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Control Range 2% to 100% of F.S. (range on mech.)
Typical Accuracy (with N2 calibration gas) ± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability ± 0.3% of Reading
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero < 0.05% of F.S./°C
Span < 0.08% of Rdg./°C
Inlet Pressure Coefficient < 0.02% of Rdg./psi
Typical Controller Settling Time < 750 msec., typical above 5% F.S.
(per SEMI Guideline E-17-0600)
Warm-up Time < 30 min
(to within 0.2% of F.S. of steady state performance)
Operating Temperature Range (Ambient) 10°C to 50°C
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature -20° to 80°C (-4° to 149° F)
Mechanical
Fittings (compatible with) Swagelok® 4 VCR® male , Swagelok 4 VCO® male , 1/4'' Swagelok compression seal, Swagelok 8 VCR male, 1/8'' Swagelok, 1/2'' Swagelok, 6 mm Swagelok, 8 mm Swagelok, surface mount
Leak Integrity
External (scc/sec He) < 1 x 10-09
Through closed valve Up to 10K valve <0.1% of FS at 40 psig to atmosphere 20K - 50K valve <1.0% of FS at 40 psig to atmosphere (To assure no flow-through, a separate positive shut-off valve is required.)
Wetted Materials
Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, Nickel
Seals and Valve Seat Viton, Buna-N, Neoprene
Surface Finish 16μ inch average Ra
Weight less than 3 lbs (1.4kg)
Enclosure Rating IP66
Electrical Analog I/O CE Compliant to EMC Directive 2004/108/EC
Input Power Required +15 to +24 VDC @ (< 4 watts)
Flow Input/Output Signal
Voltage (0 to 5 VDC) 15 pin Type ''D'' male, 9 pin Type ''D'' male
Current (4 to 20 mA) 15 pin Type ''D'' male