Micro-Pirani vakuová měrka

Popis a vlastnosti vakuové měrky 925

Micro-Pirani vakuová měrka 925 používá unikátní MEMS (Micro-electro mechanical system) senzor.
Měřící rozsah této měrky je 1.0 X 10^-5 Torr až atm.

Technická specifikace

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925
Sensor	MicroPirani™ (MEMS Thermal Conductivity)
Measuring Range	1.0 X 10-5 Torr to Atmosphere
Set Point Range	5.0 X 10-4 Torr to 500 Torr
Calibration Gas	Air, Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, Xenon, Neon
Operating Temperature	0° to 40°C (32° to 104°F)
Maximum Bakeout Temperature	85°C (185°F), non-operating
Communication	RS485/RS232 (4800 to 230400 Baud)
Controls	Zero adjust, atmosphere adjust, pressure units, baud rate, address, factory default, gas type; set point functions: value, hysteresis, direction, enable analog output transducer status, switch, LED test
Status	Pressure reading and units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions part number, manufacturer
Analog Output	1 to 9 VDC, 100Ω maximum output impedance, 1 volt/decade
Resolution	16 bit
Relays	925 - 3 relays SPDT(Optional)
Contact Rating	1 A @ 30VAC/DC, resistive
Response	<100 msec maximum
Power Requirements	9 to 30 VDC, < 1.5 watts max
Accuracy	5 X 10-4 to 10-3 Torr ±10% of reading 10-3 to 100 Torr ±5% of reading 100 Torr to atm ±25% of reading (Typical)
Repeatability	10-3 to 100 Torr ± 2% of reading (Typical)
Overpressure Limit	3000 Torr absolute
Installation Orientation	Any
Internal Volume	(KF16) 2.80 cm3
Materials Exposed to Vacuum	304 stainless steel, Silicon, SiO2, Si3N4, Gold, Viton®, Low out gassing epoxy resin
Electronic Casing and Flange	304 stainless steel