Technická specifikace
Full-Scale Ranges0.2, 1, 2, 5, 10, 20, 50, 100, 200, and 1000 Torr and equivalents in kPa, mbar, inches H2O,
and cm H2O
Resolution0.01% of Full Scale (F.S.)
Accuracy0.50% of Full Scale unidirectional or bidirectional standard; 0.30% of F.S. unidirectional or
bidirectional, and 0.30% of Reading (unidirectional calibrations only)
Temperature CoefficientsZero
0.1% Full Scale/°C for standard accuracy specification
Span
0.04% of Reading/°C
Ambient Operating Temperature0° to 50°C
Maximum Overpressure
Measurement Side120% of Full Scale or 20 psi (140 kPa), whichever is higher
Reference Side120% of Full Scale
Maximum Line Pressure40 psig (275 kPa)
Materials Exposed to Process
Measurement SideInconel
Reference SideInconel, ceramic, palladium, stainless steel, glass
Sensor Internal Volume
Measurement Side
1.4 cm
3
Reference Side
9.0 cm
3
Input Power±15VDC (±5%) or +13VDC to +30VDC @ 25 mA, ripple less than 20 mV
Electrical Connector9-pin D-subminiature standard, terminal block and flying leads optional
Certifications and ApprovalsFully compliant to EMC Directive 2004/108/EC2,
SEMI S2-0706 compliant
Restriction of Hazardous SubstancesRoHS compliant to Directive 2002-95-EC
FittingsStandard:
¼”
OD (6.4 mm) tubes
Optional:
3/16”
OD (4.8 mm) tubes, 4 male VCR®
, 4 female VCR, 4 male VCO®
, 4 female VCO,
NW16-KF
, 1.33” OD (33.8 mm) Conflat®
, 1/8” male and female NPT, 1/4” male and
female NPT