Sensor Type | Cold Cathode/MicroPirani™ (MEMS Thermal Conductivity) |
Measuring Range Absolute | 1 x 10-8 Torr to Atmosphere |
Measuring Range Differential | not available |
Set Point Range Absolute | 1 x 10-8 Torr to Atmosphere |
Set Point Range Differential | not available |
Calibration Gas | Nitrogen |
Operating Temperature Range | 0° to 40°C (32° to 104°F) |
Maximum Bakeout Temperature | 85°C (185°F), non-operating |
Digital Communications | RS485 or RS232 |
Controls | Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; setpoint functions: value, hysteresis, direction, HV enable, protect, control setpoint, gas type |
Status | Pressure reading and units, setpoint, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions |
Analog Output (Absolute Pressure) | 0.5 VDC/decade |
Relays | 3 relays, SPST |
Relay Contact Rating | 1 A @ 30VAC/DC, resistive |
Power Requirements | 9-30 VDC, 2 W |
Accuracy (Typical) Combined Absolute | 5 x 10-8 Torr to 10-3 ± 30% of reading 10-3 to 100 ±5% of reading |
Repeatability (Typical) Combined Absolute | 5 x 10-8 Torr to 10-3 ± 30% of reading 10-3 to 100 ±2% of reading |
Accuracy (Typical) 1 Differential | not available |
Repeatability (Typical) 1 Differential | not available |
Zero Stability (Typical) 1 Differential | not available |
Overpressure Limit | 1500 Torr |
Installation Orientation | Any |
Internal Volume | 21 cm3 |
Materials Exposed to Vacuum | 304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic |
Electronic Casing | 304 stainless steel |
Weight (with NW25 KF Flange) | 12.7 oz (360 g) |
CE Certification | EMC Directive 89/336/EEC, EN-61326-1 Low Voltage Directive 73/23/EEC, EN-61010-1 |