Full Scale Flow Range | 250 - 500 slm (N2 equivalent) |
Maximum Inlet Pressure | 150 psig (cannot exceed pressure differential requirement across MFC) |
Normal Operating Pressure Differential | 40 to 50 psid (dependent on fitting type) (with atmospheric pressure at the MFC outlet) |
Burst Pressure | 1500 psig |
Control Range | 2% to 100% of Full Scale (range on mech.) |
Typical Accuracy | ±1% of setpoint for >20% to 100% Full Scale ± 0.25% of Full Scale for 5% to 20% Full Scale |
Repeatability | ± 0.5% of Reading |
Resolution | 0.1% of Reading |
Temperature Coefficients | |
Zero | <0.05% of Full Scale/°C |
Span | <0.08% of Rdg./°C |
Inlet Pressure Coefficient | <0.08% of Reading/psi |
Typical Controller Settling Time | <3 sec typical above 10% Full Scale @ 50 psi |
Warm-up Time | one (1) hour |
Operating Temperature Range | 10°C to 50°C (Ambient) |
Storage Humidity | 0 to 95% Relative Humidity, non-condensing |
Storage Temperature | -20° to 65°C (-4° to 149° F) |
Fittings | Compatible with: Swagelok 8 VCR male, 8 VCO® male, 1/2 inch tube compression, 12 mm compression, 3/4 inch tube compression, 1/2 inch NPT female, 3/4 inch NPT female, Swagelok 12 VCR® male, 12 VCO® male |
Leak Integrity | |
External | <1 x 10-9 (scc/sec He) |
Through closed valve | <1.0% Full Scale at 40 psia to vac (<500 mTorr) (To assure no flow-through, a separate positive shut-off valve is required.) |
Wetted Materials | 316 S.S., Elgiloy, 430FR, PTFE (Standard) |
Seal Options | Viton®, Buna, Neoprene, EPDM |
Surface Finish | 16 µinch average Ra |
Weight | Less than 12.7 lbs. (5.8 kg) |
Enclosure Rating | IP66 |
Compliance | CE Compliant to EMC Directive 2004/108/EC |
Input Power Required | +15 to +24 VDC @ (<8 watts) |
Flow Input/Output Signal | |
Voltage | (0 to 5 VDC) 15-pin Type "D" male |
Current | (4 to 20 mA) 15-pin Type "D" male |