Full Scale Flow Ranges | 5 - 50000 sccm (N2 equivalent) (consult factory for available flow ranges) |
Maximum Inlet Pressure | 150 psig (can not exceed pressure differential requirement across MFC) |
Normal Operating Pressure Differential | 5 to 5000 sccm; 10 to 40 psid 10000 to 20000 sccm; 15 to 40 psid 30000 to 50000 sccm; 25 to 40 psid (N2 Full Scale) (with atmospheric pressure at the MFC outlet) |
Proof Pressure | 1000 psig |
Burst Pressure | 1500 psig |
Control Range | 2% to 100% of Full Scale (range on mech.) |
Typical Accuracy | ±1% of setpoint for 20 to 100% Full Scale ± 0.2% of Full Scale for 2 to 20% Full Scale (with N2 calibration gas) |
Repeatability | ± 0.3% of Reading |
Resolution | 0.1% of Full Scale |
Temperature Coefficients | |
Zero | <0.05% of Full Scale/°C |
Span | <0.08% of Reading/°C |
Inlet Pressure Coefficient | <0.02% of Reading/psi |
Typical Controller Settling Time | <750 msec, typical above 5% (per SEMI Guideline E-17-0600) |
Warm-up Time | <30 minutes (to within 0.2% of Full Scale of steady state performance) |
Operating Temperature Range | 10°C to 50°C (Ambient) |
Storage Humidity | 0 to 95% Relative Humidity, non-condensing |
Storage Temperature | -20° to 80°C (-4° to 149° F) |
Fittings | Compatible with Swagelok® 4 VCR® male, 1/4 inch Swagelok® compression seal, surface mount, Swagelok® 8 VCR® male, 1/8 inch Swagelok®, 1/2 inch Swagelok®, 6 mm Swagelok®, 8 mm Swagelok® |
Leak Integrity | |
External | <1 x 10-10 (scc/sec He) |
Through closed valve | <1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is required.) |
Wetted Materials | |
Standard | 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, Nickel |
Valve Seat | Teflon® (MFC only) |
Surface Finish | |
MFC | 10µ inch average Ra |
MFM | 16µ inch average Ra |
Weight | less than 3 lbs (1.4kg) |
Compliance | Compliant to EMC Directive 2004/108/EC |
Electrical Analog I/O Input Power Required | +15 to +24 VDC @ (<4 watts) |
Electrical Analog I/O Flow Input/Output Signal | |
Voltage | (0 to 5 VDC) 15 pin Type "D" male, 9 pin Type "D" male |
Current | (4 to 20 mA) 15 pin Type "D" male |
Input Power Required | |
DeviceNet™ | +11 to +25 VDC per (<4 watts) |
RS-485 | +15 to +24 VDC per (<4 watts) |
Profibus® | +15 to +24 VDC per (<4 watts) |
EtherCAT® | +24 VDC per (<5 watts) |
Connector | |
DeviceNet™ | 5 pin micro connnector (power and comm.) |
RS-485 | 9 pin Type D male (power and comm.) |
Profibus® | 9 pin Type D male (power); 9 pin Type D female (comm.) |
EtherCAT® | 2 x RJ-45 (comm.) male; M8 male, 5 pin (power) |
Data Rate Switch/Selection | |
DeviceNet™ | 4 positions: 125, 250, 500K (Default)programmable over network |
RS-485 | No switch Set Data Rate via RS485 |
Profibus® | Set Data Rate via Profibus |
EtherCAT® | No switch |
Comm. Rate(s) | |
DeviceNet™ | 125 Kbps, 250 Kbps, 500 Kbps |
RS-485 | 9.6 Kbps, 19.2 Kbps, 38.4 Kbps |
Profibus® | 9.6 Kbps to 12 Mbps |
EtherCAT® | 100 Mbps |
MAC ID Switches/Addresses | |
DeviceNet™ | 2 switches, 10 positions; 0,0 to 6,3 ; 1 to 254 |
RS-485 | Set address over RS485; Station Addresses 0,0 to 9,9 |
Profibus® | 2 switches, 10 positions |
EtherCAT® | 3 switches, 16 positions |
Network Size | |
DeviceNet™ | Up to 64 nodes |
RS-485 | Up to 32 nodes |
Profibus® | Up to 99 nodes |
EtherCAT® | Up to 4095 nodes |
Visual Communication Indicators | |
DeviceNet™ | LED network status (green/red) LED module status (green/red) |
RS-485 | LED Comm (yellow) LED Error (red) |
Profibus® | LED Comm (green/red) LED Error (green/red) |
EtherCAT® | LED Power (green) LED Run (green) LED Error (red) LED /Comm (green) |