Full Scale Ranges | 10, 20, 50, 100, 200, 500, 1,000, 2,000, 5,000, 10,000, 20,000, 30,000, 50,000 sccm (N2 equivalent) |
Maximum Inlet Pressure | 10 bar(g) (both MFC and MFM) |
Normal Operating Pressure Differential | 10 to 5000 sccm: 0.7 to 2.7 bar (d) 10000 to 20000 sccm: 1.0 to 2.7 bar (d) (with atmospheric pressure at the MFC outlet) |
Proof Pressure | 10 bar |
Burst Pressure | 50 bar |
Control Range | 2% to 100% of Full Scale |
Measurement (Dynamic) Range | 1% to 100% of Full Scale |
Typical Accuracy | ±(0.5% of reading +0.2% of Full Scale) (with N2 calibration gas) (including non-linearity, hysteresis and repeatability referenced to 1013 mbar and 0°C) |
Repeatability | ±0.2% of Full Scale |
Resolution | 0.1% of Full Scale |
Temperature Coefficients | |
Zero | <0.04% of Full Scale/°C |
Span | <0.08% of Reading/°C |
Pressure Coefficient | <0.02% of reading/psi |
Controller Settling Time | <800 msec (350 msec on request) (per SEMI Guideline E17-91) |
Warm-up Time | ~ 15 minutes |
Normal Operating Temperature Range | 0°C to 40°C |
Storage | |
Humidity | 0 to 95% Relative Humidity, non-condensing |
Temperature | -20° to 80°C |
Fittings | 4 VCR® 1/4 inch Swagelok® 1/8 inch Swagelok® 4 VCO® 6 mm Swagelok® DN 16 KF MKS Surface Mount |
Leak Integrity | |
External | <1 x 10-9 mbar l/sec (He) (scc/sec He) |
Through Closed Control Valve | <1 x 10-5 mbar l/sec (He) at 1.7 bar(g) inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is required) (MFC only) |
Wetted Materials | |
MFC, Standard | 1.4301 S.S. (V2A, ANSI 304), FKM, Nickel |
MFC, Optional | NBR, FFKM (seals and valve seal) |
Surface Finish | 6.3µ Rz |
Weight | ~ 0.7 kg (1.6 lbs) |
Input Voltage Required | ±15 VDC or +24 VDC (20.0 to 31.5 VDC) |
Maximum Supply Current | 300mA @ +24VDC |
Analog Set Point Command Signal | Configurable: Default: 0 to 5 VDC Zero: 0 to 2 VDC Full Scale: 5 to 10VDC (Analog interface versions only) |
Analog Output Signal | Configurable: Default: 0 to 5 VDC Zero: 0 to 2 VDC Full Scale: 5 to 10VDC (Analog interface versions only) |
Connectors | |
Power | Standard Industrial Terminal, 3.81 mm pitch (Phoenix Contact MC-series, 3.81 mm pitch) |
Setup | USB Setup Interface micro-B |
Signal | Analog: 9-pin D-Sub pin Analog: 15-pin D-Sub pin Profibus-DPV0/DPV1: 9-pin D-Sub socket Modbus: 9-pin D-Sub socket EtherCAT, Profinet, Modbus TCP: 2x RJ45 USB Process Interface: B |
Compliance | Fully CE Compliant to EMC Directive 2004/108/336/EC when used with an overall metal braided shielded cable properly grounded at both ends |